Innolume’s Major Equipment Upgrade: Introduction of Sigma 360 SEM

As part of Innolume’s ongoing efforts to modernize its laboratory equipment, a significant upgrade was implemented last month. The old Supra 25 system in the clean room was replaced with the state-of-the-art Sigma 360 Scanning Electron Microscope (SEM).

The new Sigma 360 offers a range of user-friendly features designed to streamline inspection processes. One notable enhancement is the automatic acquisition of navigation images. When the sample holder is loaded into the SEM, the system automatically captures a high-quality image of the sample’s position using a built-in camera. This greatly simplifies locating specific areas within the chamber and ensures precise navigation across the sample surface.

The Sigma 360 was installed with the latest version of the SmartSEM software, featuring an intuitive interface and customizable macros for routine tasks such as sample loading, image quality adjustment, and rapid image saving. This automation allows operators to perform inspections more quickly and reliably.

In addition to its stability and high performance, the Sigma 360 is equipped with advanced analytical capabilities, including Energy Dispersive X-Ray Spectroscopy (EDAX) and Electron-beam-induced Current (EBIC). The new EDAX system eliminates the need for complex preparations and long cooling times, enabling immediate operation after startup. Its integration with the updated AZtec software allows for precise material composition analysis, either point-by-point or across entire sample surfaces, providing engineers with more accurate data for their assessments.

This upgrade significantly enhances Innolume’s inspection and analysis capabilities, supporting more efficient and accurate research and development activities.