New DektakXT Equipment
Innolume is dedicated to enhancing its high-tech device production capabilities through continuous technological advancements. A key element of this initiative is the deployment of updated equipment, exemplified by the recent installation of the DektakXT profilometer in the clean room, designed to replace the older Dektak model.
The DektakXT is equipped with advanced features that streamline the data collection process. The Vision64 software enables users to create automated recipes for profile acquisition at predetermined points on the wafer. Notably, the embedded position control feature minimizes the need for manual alignment, thus improving efficiency and consistency in wafer positioning on the object table. Following the profiling, the software automatically analyzes the results and records them in a designated database. Users benefit from the flexibility in data storage options, either consolidating all data into a single database or organizing it by individual wafers. This capability enhances statistical analysis across different processes, enabling engineers to refine device parameters with greater accuracy.
In addition to automated profiling, the DektakXT supports various engineering and experimental projects by offering single profile acquisitions. The profiling process is optimized through smart measurement length detection, an adjustable zoom camera, and a wide range of measurement parameters, all contributing to high-precision results. The Vision64 program further enriches data analysis by providing a selection of specialized filters tailored to the unique requirements of each experiment.
Beyond traditional profiling, the DektakXT expands analytical possibilities with features like wafer curvature measurement, 3D surface mapping, and film stress measurements. These additional capabilities will be instrumental in gathering comprehensive data on manufactured products, aiding in the ongoing enhancement of the quality and performance of Innolume's devices. Overall, the implementation of the DektakXT profilometer signifies a significant stride towards achieving higher standards in production and quality assurance.
