Alox oxidation furnace
Our company has acquired a modern wet thermal oxidation furnace from Aloxtec, which was specifically developed for the lateral oxidation of AlGaAs layers on mesas.
An outstanding feature of this innovative furnace is the advanced vision system, which enables real-time monitoring of the aperture width of the mesa during the oxidation process. Furthermore, this technology provides precise control over critical process parameters such as temperature, pressure, water and gas flow as well as local temperature control on the wafers and results in significantly improved Wafer homogeneity.
The installation of the new furnace, which is already in use, was completed in mid-August. Following successful testing, the ALOX Thermal furnace is now actively contributing to the production of our products. This investment highlights our dedication to maintaining the highest quality standards and fostering continuous innovation. With this new furnace in operation, we are optimally positioned to enhance our production processes and boost the efficiency of our manufacturing efforts.
